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Yield Assessment of Protective Coatings for Atom Probe Analysis

Published online by Cambridge University Press:  22 July 2022

Yimeng Chen ,
Katherine P. Rice  and
Robert M. Ulfig
Yimeng Chen*
Affiliation:
CAMECA Instruments Inc., Madison, WI USA
Katherine P. Rice
Affiliation:
CAMECA Instruments Inc., Madison, WI USA
Robert M. Ulfig
Affiliation:
CAMECA Instruments Inc., Madison, WI USA
*
*Corresponding author: Yimeng.Chen@ametek.com

Abstract

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Type
Advances in Focused Ion Beam Instrumentation, Applications and Techniques in Materials and Life Sciences
Information
Microscopy and Microanalysis , Volume 28 , Supplement S1 , August 2022 , pp. 72 - 73
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Copyright
Copyright © Microscopy Society of America 2022

References

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Thompson, K. et al. , Microsc. Microanal. 11 (S2), (2005) p. 882.Google Scholar