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T- SEM: Quantitative Composition and Structure Analysis of FIB lamellae in SEM

Published online by Cambridge University Press:  22 July 2022

Meiken Falke*
Bruker Nano GmbH, Berlin, Germany
Purvesh Soni
Bruker Nano GmbH, Berlin, Germany
Anna Mogilatenko
Ferdinand-Braun-Institut gGmbH, Leibniz-Institut für Höchstfrequenztechnik, Berlin Germany Humboldt Universität zu Berlin, Germany
*Corresponding author:


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Advances in Focused Ion Beam Instrumentation, Applications and Techniques in Materials and Life Sciences
Copyright © Microscopy Society of America 2022


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