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Quantitative Energy Dispersive Analysis Technique of SiGe at Site-specific area using In-situ Lift-out TEM sample

Published online by Cambridge University Press:  09 October 2013

T.-S. Park ,
H.-J. Kang ,
J.-W. Chung ,
B.-M. Song ,
T.-S. Back ,
H.-J. Kim  and
C.-R. Kim
T.-S. Park
Affiliation:
H.-J. Kang
Affiliation:
J.-W. Chung
Affiliation:
B.-M. Song
Affiliation:
T.-S. Back
Affiliation:
H.-J. Kim
Affiliation:
C.-R. Kim
Affiliation:

Abstract

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Extended abstract of a paper presented at Microscopy and Microanalysis 2013 in Indianapolis, Indiana, USA, August 4 – August 8, 2013.

Type
Abstract
Information
Microscopy and Microanalysis , Volume 19 , Issue S2: Proceedings of Microscopy & Microanalysis 2013 , August 2013 , pp. 1286 - 1287
Copyright
Copyright © Microscopy Society of America 2013