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3D Nanoscale Imaging of Semiconductor Films for GAA (Gate All Around) Device Development

Published online by Cambridge University Press:  22 July 2022

Pritesh Parikh ,
Darshan Jaware  and
Jiangtao Zhu
Pritesh Parikh
Affiliation:
Eurofins Nanolab Technologies, 1708 McCarthy Blvd, Milpitas, CA, United States
Darshan Jaware
Affiliation:
Eurofins Nanolab Technologies, 1708 McCarthy Blvd, Milpitas, CA, United States
Jiangtao Zhu*
Affiliation:
Eurofins Nanolab Technologies, 1708 McCarthy Blvd, Milpitas, CA, United States
*
*Corresponding author: jiangtaozhu@eurofins-nanolab.com

Abstract

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Type
Advanced 3D Imaging and Analysis Methods for New Opportunities in Material Science
Information
Microscopy and Microanalysis , Volume 28 , Supplement S1 , August 2022 , pp. 318 - 319
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Copyright
Copyright © Microscopy Society of America 2022

References

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