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Thermodynamics of (Cr, Mo, Nb, Ta, V, or W)–Si–Cu ternary systems

Published online by Cambridge University Press:  31 January 2011

J.S. Reid ,
E. Kolawa  and
M-A. Nicolet
J.S. Reid
Affiliation:
Department of Electrical Engineering, California Institute of Technology, Pasadena, California 91125
E. Kolawa
Affiliation:
Department of Electrical Engineering, California Institute of Technology, Pasadena, California 91125
M-A. Nicolet
Affiliation:
Department of Electrical Engineering, California Institute of Technology, Pasadena, California 91125
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Abstract

The room-temperature and 700 °C tie lines of the early transition metal–Si–Cu ternary systems have been calculated for the metals Cr, Mo, Nb, Ta, V, and W. The tie lines are determined by considering only binary and elemental phases in observance of strict stoichiometry and zero solid solubility. We find that copper is stable with the majority of transition metal silicides under consideration at 700 °C. The result is relevant to the design of stable copper metallizations for silicon.

Type
Articles
Information
Journal of Materials Research , Volume 7 , Issue 9 , September 1992 , pp. 2424 - 2428
Copyright
Copyright © Materials Research Society 1992

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