Hostname: page-component-8448b6f56d-t5pn6 Total loading time: 0 Render date: 2024-04-19T20:53:17.184Z Has data issue: false hasContentIssue false
  • English
  • Français

Synthesis and properties of BxCyNz coatings

Published online by Cambridge University Press:  26 November 2012

M. N. Oliveira  and
O. Conde
M. N. Oliveira
Affiliation:
Department of Physics, Faculty of Sciences, University of Lisbon, Campo Grande Ed. C8, 1749–016 Lisboa, Portugal
O. Conde
Affiliation:
Department of Physics, Faculty of Sciences, University of Lisbon, Campo Grande Ed. C8, 1749–016 Lisboa, Portugal
Get access

Abstract

Some of the most interesting compounds from both technological and a scientific viewpoint can be found within the B–C–N composition triangle. Despite all the attention that some phases on the vertices and sides of the triangle have attracted, few works have focused inside the triangle itself. A laser-assisted chemical vapor deposition system was used to deposit B–C–N phases over fused quartz substrates. Two sets of gaseous precursors were used, namely B2H6 + NH3 + C2H4 and B2H6 + (CH3)2NH. The coatings were characterized regarding chemical composition, structure, and morphology. Hardness measurements were also carried out with a depth-sensing indentation instrument. It was found that depending on the gas phase, different regions of the BCN solid composition triangle are accessed. Coatings ranging from pure h-BN to pure B4C were obtained, as well as mixtures of these with BxCyNz compounds.

Type
Articles
Information
Journal of Materials Research , Volume 16 , Issue 3 , March 2001 , pp. 734 - 743
Copyright
Copyright © Materials Research Society 2001

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

1.Kawaguchi, M., Adv. Mater. 9, 615 (1997).CrossRefGoogle Scholar
2.Ya Kosolapova, T., Makarenko, B.N., Serebryakova, T., Prilutksii, E.V., Khoryakov, O.T., and Chenysheva, O.I., Poroshk. Metall. 1, 27 (1971).Google Scholar
3.Badzian, A.R., Appenheimer, S., Niemyski, T., and Olkusnik, E., in Proceedings of the 3rd International Conference on CVD, edited by Glaski, F.A. (American Nuclear Society, Hinsdale, IL, 1972), pp. 747–753.Google Scholar
4.Chen, S.H. and Diefendorf, R.J., in Proceedings of the 3rd International Carbon Conference (Baden-Baden, FRG, 1980), pp. 45–46.Google Scholar
5.Kaner, R.B., Kouvetakis, J., Warble, C.E., Sattler, M.L., and Bartlett, N., Mater. Res. Bull. 22, 399 (1987).CrossRefGoogle Scholar
6.Moore, A.W., Strong, S.L., Doll, G.L., Dresselhaus, M.S., Spain, I.L., Bowers, C.W., Issi, J.P., and Piraux, L., J. Appl. Phys. 65, 5109 (1989).CrossRefGoogle Scholar
7.Saugnac, F., Teyssandier, F., and Marchand, A., J. Am. Ceram. Soc. 75, 161 (1992).CrossRefGoogle Scholar
8.Dubokiv, T.V. and Andreeva, T.V., Less-Common Metals 117, 265 (1986).Google Scholar
9.Knotek, O., Lugscheider, E., and Siry, C.W., in Hard Coatings Based on Borides, Carbides and Nitrides, edited by Kumar, A., Chung, Y., and Chia, R.W. (The Minerals, Metals and Materials Society, Warrendale, PA, 1998), pp. 169–178.Google Scholar
10.Dekempeneer, E.H.A., Wagner, V., Ijzendoora, L.J., Meneve, J., Kuypers, S., Smeets, J., Grunts, J., and Carrdano, R., Surf. Coat. Technol. 86–87, 581 (1996).CrossRefGoogle Scholar
11.Redlich, Ph., Loeffler, J., Ajayan, P.M., Bill, J., Aldinger, F., and Ruhle, M., Chem. Phys. Lett. 260, 465 (1996).CrossRefGoogle Scholar
12.Dinescu, M., Perrone, A., Caricato, A.P., Mirenghi, L., Gerardi, C., Ghica, C., and Frunza, L., Appl. Surf. Sci. 127–129, 692 (1998).CrossRefGoogle Scholar
13.Ulrich, S., Ehrhardt, H., Theel, T., Schwan, J., Westermeyr, S., Scheib, M., Becker, P., Oechsner, H., Dollinger, G., and Bergmaier, A., Diamond Relat. Mater. 7, 839 (1998).CrossRefGoogle Scholar
14.Telle, R., in Structure and Properties of Ceramics, edited by Swain, M.V., Materials Science and Technology, vol. 11 (VCH Publishers, Weinheim, 1994), pp. 173–266.Google Scholar
15.Conde, O., Oliveira, J.C., Paiva, P., and Oliveira, M.N., in Protective Coatings and Thin Films, edited by Pauleau, Y. and Barna, P.B., NATO ASI Series, vol. 21 (Kluwer Academic Publishers, Dordrecht, NL, 1996), pp. 99–109.Google Scholar
16 a)Shimanouchi, T., Tables of molecular vibrational frequencies consolidated volume I, National Bureau of Standards, 1972, and b) NIST Standard Reference Data Program, http://webbook.nist.govCrossRefGoogle Scholar
17.Oliveira, J.C. and Conde, O., Thin Solid Films 307, 29 (1997), and references therein.CrossRefGoogle Scholar
18.Conde, O., Silvestre, A.J., and Oliveira, J.C., Surf. Coat. Technol. 125, 141 (2000).CrossRefGoogle Scholar
19.Cullity, B.D., Elements of X-ray Diffraction, 2nd edition (Addison-Wesley, Reading, MA, 1978).Google Scholar
20.Warren, B.E., X-ray Diffraction (Dover Publications, New York, NY, 1990).Google Scholar
21.Aselage, T.L., Tallant, D.R., Gieske, J.H., Van Deusen, S.B., and Tissot, R.G., in The Physics and Chemistry of Carbides, Nitrides and Borides, edited by Freer, R., NATO ASI Series, vol. 185 (Kluwer Academic Publishers, Dordrecht, NL, 1990), pp. 97–111.CrossRefGoogle Scholar
22.Backmann, P.K. and Wiechert, D.U., in Diamond and Diamond-Like Films and Coatings, edited by Clausing, R.E. et al., NATO ASI Series, vol. 266 (Plenum Press, New York, NY, 1991), pp. 677–713.CrossRefGoogle Scholar
23.Emin, David, Physics Today, January 1987, p. 55.CrossRefGoogle Scholar
24.Tallant, D.R., Aselage, T.L., Campbell, A.N., and Enim, D., Phys. Rev. B 40, 5649 (1989).CrossRefGoogle Scholar
25.Oliveira, M.N., Botelho do Rego, A.M., and Conde, O., Surf. Coat. Technol. 100–101, 398 (1998).CrossRefGoogle Scholar
26.Szorényi, T., Fogarassy, E., Fuchs, C., Hommet, J., and Le Normand, F., Appl. Phys. A 69, [Suppl.], S941 (1999).Google Scholar
27.Weber, A., Bringmann, U., Nikiulski, R., and Klages, C.P., Diamond Relat. Mater. 2, 201 (1993).CrossRefGoogle Scholar
28.NIST XPS database at http://srdata.nist.gov/xps/Google Scholar