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Reduced thermal decomposition of OH-free LiNbO3 substrates even in a dry gas atmosphere

Published online by Cambridge University Press:  31 January 2011

Hirotoshi Nagata
Affiliation:
Optoelectronics Division, Sumitomo Osaka Cement Co., Ltd., 585 Toyotomi-cho, Funabashi-shi, Chiba 274, Japan
Toshihiro Sakamoto
Affiliation:
Optoelectronics Division, Sumitomo Osaka Cement Co., Ltd., 585 Toyotomi-cho, Funabashi-shi, Chiba 274, Japan
Hideki Honda
Affiliation:
Optoelectronics Division, Sumitomo Osaka Cement Co., Ltd., 585 Toyotomi-cho, Funabashi-shi, Chiba 274, Japan
Junichiro Ichikawa
Affiliation:
Optoelectronics Division, Sumitomo Osaka Cement Co., Ltd., 585 Toyotomi-cho, Funabashi-shi, Chiba 274, Japan
Eungi Min Haga
Affiliation:
Central Research Laboratories, Sumitomo Osaka Cement Co., Ltd., 585 Toyotomi-cho, Funabashi-shi, Chiba 274, Japan
Kaori Shima
Affiliation:
Central Research Laboratories, Sumitomo Osaka Cement Co., Ltd., 585 Toyotomi-cho, Funabashi-shi, Chiba 274, Japan
Nobuhiko Haga
Affiliation:
Faculty of Science, Himeji Institute of Technology, Kamigori-cho, Ako-gun, Hyogo 678–12, Japan
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Abstract

A thermal diffusion process of Ti into a LiNbO3 substrate for optical waveguides has generally been carried out under a wet gas atmosphere in order to prevent undesirable Li outdiffusion. In this work, such thermal decomposition was confirmed to be significantly suppressed for an OH-free LiNbO3 substrate, even after a dry atmosphere annealing. No extra x-ray diffraction peak for LiNb3O8 was detected from the OH-free substrate after 10 h of annealing at 1000 °C in a dry O2. Furthermore, the surface morphology of this sample, and as well an unannealed one, were smooth. In a conventional LiNbO3 substrate containing many OH ions, subjected to a similar dry annealing, the presence of the LiNb3O8 phase and a surface coarsening were observed.

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Articles
Copyright
Copyright © Materials Research Society 1996

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