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Quantitative adhesion measures of multilayer films: Part I. Indentation mechanics

Published online by Cambridge University Press:  31 January 2011

Michael D. Kriese ,
William W. Gerberich  and
Neville R. Moody
Michael D. Kriese
Affiliation:
Department of Chemical Engineering and Materials Science, University of Minnesota, Minneapolis, Minnesota 55455
William W. Gerberich
Affiliation:
Department of Chemical Engineering and Materials Science, University of Minnesota, Minneapolis, Minnesota 55455
Neville R. Moody
Affiliation:
Sandia National Laboratories, Livermore, California 94551
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Abstract

The mechanics for calculating the quantitative driving force of indentation-induced delamination of thin-film multilayers is presented. The solution is based on the mechanics developed by Marshall and Evans [D.B. Marshall and A.G. Evans, J. Appl. Phys. 56, 2632 (1984).] and extended to the general case of a multilayer by use of standard bending and thin-plate analyses. Presented and discussed are the specific solutions for the bilayer case that show that in the limit of zero thickness of either layer, the solution converges to the single-layer case. In the range of finite thickness, the presence of the superlayer increases the driving force relative to that possible for the original film alone and can be optimized to the experimental situation by proper choice of thickness, elastic constants, and residual stress. The companion paper “Quantitative adhesion measures of multilayer films: Part II. Indentation of W/Cu, W/W, Cr/W” discusses experimental results with copper, tungsten, and chromium thin films.

Type
Articles
Information
Journal of Materials Research , Volume 14 , Issue 7 , July 1999 , pp. 3007 - 3018
Copyright
Copyright © Materials Research Society 1999

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References

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