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Production and characterization of titanium and iron oxide nano-sized thin films

Published online by Cambridge University Press:  31 January 2011

E. Comini ,
G. Sberveglieri ,
M. Ferroni ,
V. Guidi ,
C. Frigeri  and
D. Boscarino
E. Comini
Affiliation:
INFM and Dip. di Chimica Fisica per l'Ingegneria e per i Materiali, Via Valotti 9, I–25133 Brescia, Italy
G. Sberveglieri
Affiliation:
INFM and Dip. di Chimica Fisica per l'Ingegneria e per i Materiali, Via Valotti 9, I–25133 Brescia, Italy
M. Ferroni
Affiliation:
Dipartimento di Fisica, Universitàdi Ferrara and INFM Via Paradiso 12, I–44100 Ferrara, Italy
V. Guidi
Affiliation:
Dipartimento di Fisica, Universitàdi Ferrara and INFM Via Paradiso 12, I–44100 Ferrara, Italy INFN, sezione di Ferrara, Ferrara, Italy
C. Frigeri
Affiliation:
Istituto CNR-MASPEC Parco Area Delle Scienze, I–43100 Parma, Italy
D. Boscarino
Affiliation:
Laboratori Nazionali Legnaro, INFN, Via Romea 4, I–35020, Legnaro (Padova), Italy
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Abstract

We present a simple and reproducible method to obtain TiO2 and Fe2O3 mixed-oxide thin films by reactive radio-frequency sputtering. The influence of iron concentration on the structural properties of the layers has been studied. Structural characterization, carried out by electron microscopy analysis, allowed one to correlate the inhibition of the grain growth of titania to the presence of iron oxide and to its segregation at grain boundaries. This behavior should be ascribed to a superficial-tension phenomenon. As a possible application of these thin films, we have investigated the gas-sensing properties toward CO, with particular focus on the role of Fe. The layers were capable to sense CO down to the level requested for environmental monitoring.

Type
Articles
Information
Journal of Materials Research , Volume 16 , Issue 6 , June 2001 , pp. 1559 - 1564
Copyright
Copyright © Materials Research Society 2001

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