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Optical and mechanical properties of dc sputtered carbon films

Published online by Cambridge University Press:  31 January 2011

M. Rubin ,
C. B. Hopper ,
N-H. Cho  and
B. Bhushan
M. Rubin
Affiliation:
Lawrence Berkeley Laboratory, University of California, Berkeley, California 94720
C. B. Hopper
Affiliation:
Lawrence Berkeley Laboratory, University of California, Berkeley, California 94720
N-H. Cho
Affiliation:
Lawrence Berkeley Laboratory, University of California, Berkeley, California 94720
B. Bhushan
Affiliation:
IBM Research Division, IBM Almaden Research Center, 650 Harry Road, San Jose, California 95120-6099
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Abstract

Amorphous carbon films were deposited on glass by dc magnetron sputtering from a graphite target in mixtures of argon and hydrogen. Hydrogen flow and other parameters affected the optical and mechanical properties of these films. Increasing hydrogen content caused the average visible transmittance to vary from 16% to 86% for 500-Å thick films. Maximum compressive stress and hardness occur between 0 and 1% hydrogen flow, resulting in rapid delamination. Low sputtering power moderately increases transmittance and hardness while relieving stress. Transparency is induced in both the high-hydrogen and low-power films by formation of sp3 C–C bonds. In the case of the hydrogenated films, however, a softer polymeric structure is formed.

Type
Diamond and Diamond-Like Materials
Information
Journal of Materials Research , Volume 5 , Issue 11 , November 1990 , pp. 2538 - 2542
Copyright
Copyright © Materials Research Society 1990

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References

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