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Optical and electronic properties of nitrogen-implanted diamond-like carbon films

Published online by Cambridge University Press:  03 March 2011

G.L. Doll ,
J.P. Heremans ,
T.A. Perry  and
J.V. Mantese
G.L. Doll
Affiliation:
General Motors Research Laboratories, Warren, Michigan 48090–9055
J.P. Heremans
Affiliation:
General Motors Research Laboratories, Warren, Michigan 48090–9055
T.A. Perry
Affiliation:
General Motors Research Laboratories, Warren, Michigan 48090–9055
J.V. Mantese
Affiliation:
General Motors Research Laboratories, Warren, Michigan 48090–9055
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Abstract

Optical and electrical measurements on nitrogen ion-implanted diamond-like carbon films are presented. Raman scattering measurements, which probe the crystallinity of the film surface, indicate that nitrogen implantation reduces the finite crystallographic order in the pristine carbon films. The absence of molecular vibrations in the infrared absorption spectra of the films argues against a polymeric structure of the ion-implanted films. Spectroscopic ellipsometry experiments determine the change in the optical constants of the carbon film due to nitrogen implantation. Electrical de conductivity measurements are interpreted within the framework of a schematic density of states picture of graphitic τ-electrons in an amorphous carbon system. Taken collectively, the optical and electrical measurements suggest that nitrogen implantation increases the density of localized states within the 1.5 eV bandgap of the quasi-amorphous carbon film, thereby reducing the bandgap and increasing the conductivity of the nitrogen-implanted films.

Type
Articles
Information
Journal of Materials Research , Volume 9 , Issue 1 , January 1994 , pp. 85 - 90
Copyright
Copyright © Materials Research Society 1994

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