Hostname: page-component-8448b6f56d-jr42d Total loading time: 0 Render date: 2024-04-23T08:43:08.549Z Has data issue: false hasContentIssue false
  • English
  • Français

Nanostructure evolution and properties of two-phase nc-Ti(C, N)/a-(C, CNx) nanocomposites by high-resolution transmission electron microscopy, x-ray photoelectron spectroscopy, and Raman spectroscopy

Published online by Cambridge University Press:  31 January 2011

Y.H. Lu  and
Y.G. Shen
Y.H. Lu
Affiliation:
Department of Materials Physics, Beijing University of Science and Technology, Beijing 100083, People’s Republic of China
Y.G. Shen*
Affiliation:
Department of Manufacturing Engineering & Engineering Management, City University of Hong Kong, Kowloon, Hong Kong
*
a)Address all correspondence to this author. e-mail: meshen@cityu.edu.hk
Get access

Abstract

High-resolution transmission electron microscopy, x-ray photoelectron spectroscopy (XPS), and Raman spectroscopy were used to study phase configuration and nanostructure evolutions of Ti–Cx–Ny thin films with different amounts of C incorporation. It was found that the atomic ratio of (C + N)/Ti played a crucial role in phase configuration and nanostructure evolutions as well as mechanical behaviors. When the ratio was less than one unit, a nanocrystalline (nc-) Ti(C, N) solid solution was formed by way of dissolution of C into TiN lattice. When this dissolution reached saturation, precipitation of a small amount of amorphous (a-) C phase along nc-Ti(C, N) grains was followed with more C incorporation. Further increase of C content (up to ∼19 at.% C) made the amorphous phase fully wet nanocrystallites, which resulted in the formation of two-phase nanocomposite thin films with microstructures comprising of ∼5 nm nc-Ti(C,N) crystallites separated by ∼0.5 nm a-(C, CNx) phase. Thicker amorphous walls and smaller sized grains were followed when the C content was further increased, accompanying with the formation of some disorders and defects in nc-grains and amorphous matrices. When the C content was increased to ∼48 at.%, 1–3 nm nanocrystallites with an average size of ∼2 nm were embedded into amorphous matrices. Both microhardness and residual compressive stress values were increased with increase of the atomic ratio in solid solution thin films when the atomic ratio value was less than one unit. Their maximums were obtained at stiochiometry nc-Ti(C,N) solid solution. Enhancement of hardness values was attributed to solid solution effect.

Keywords

Thin filmNanostructureHardness
Type
Articles
Information
Journal of Materials Research , Volume 22 , Issue 9 , September 2007 , pp. 2460 - 2469
Copyright
Copyright © Materials Research Society 2007

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

1Narasimhan, K., Boppana, S.S. PrasadBhat, D.G.: Development of a graded TiCN coating for cemented carbide cutting tools: A design approach. Wear 188, 123 1995Google Scholar
2Hauert, R., Patscheider, J., Knoblauch, L.Diserens, M.: New coatings by nanostructuring. Adv. Mater. 11, 175 1999Google Scholar
3Mayrhofer, P.H., Mitterer, C.Clemens, H.: Self-organized nanostructures in hard ceramic coatings. Adv. Eng. Mater. 7, 1071 2005Google Scholar
4Vepřek, S., Vepřek-Heijman, G.J., Karvankova, M.P.Prochazkz, J.: Different approaches to superhard coatings and nanocomposite. Thin Solid Films 476, 1 2005Google Scholar
5Cheng, D.J., Sun, W.P.Mon, M.H.: The morphology and structure of chemical vapor deposited Ti(C, N) coating. Thin Solid Films 146, 45 1987CrossRefGoogle Scholar
6Lu, Y.H., Liu, Z.J.Shen, Y.G.: Investigation of nanostructure evolution and deformation of nanocrystallite in Ti–Bx–Ny nanocomposite thin films by HRTEM and Monte Carlo simulation. Acta Mater. 54, 2897 2006Google Scholar
7Demkowicz, M.J.Argon, A.S.: High-density liquidlike component facilitates plastic flow in a model amorphous silicon system. Phys. Rev. Lett. 93, 025505 2004Google Scholar
8Vepřek, S., Nesládek, P., Niederhofer, A., Glatz, F., Jílek, M.Šíma, M.: Recent progress in the superhard nanocrystalline composites: Towards their industrialization and understanding of the superhardness. Surf. Coat. Technol. 108–109, 138 1998Google Scholar
9Karlsson, L., Hultman, L., Sundgen, J.E.Karlsson, L.: Influence of residual stresses on the mechanical properties of TiCxNt−x (x = 0, 0.15, 0.45) thin films deposited by arc evaporation. Thin Solid Films 371, 167 2000Google Scholar
10Jhi, S.H., Ihm, J., Louie, S.G.Cohen, M.L.: Electric mechanism of hardness enhancement in transition-metal carbonitrides. Nature 399, 132 1999Google Scholar
11McCulloch, D.G., Prawer, S.Hoffman, A.: Structural investigation of xenon-ion-beam-irradiated glassy carbon. Phys. Rev. B 50, 5905 1994CrossRefGoogle ScholarPubMed
12Carrasco, C.A., Vergara, S.V., Benavente, G.R., Mingolo, N.Rios, J.C.: The relationship between residual stress and process parameters in TiN coatings on copper alloy substrates. Mater. Character. 48, 81 2002Google Scholar
13Sundgren, J.E., Rockett, A.Greene, J.E.: Microstructural and microchemical characterization of hard coatings. J. Vac. Sci. Technol., A 4, 2770 1986CrossRefGoogle Scholar
14Hultman, L.: Thermal stability of nitride thin films. Vacuum 57, 1 2000Google Scholar
15Naeini, J.G., Way, B.M., Dahn, J.R.Irwin, J.C.: Raman scattering from boron substituted carbon films. Phys. Rev. B 54, 144 1996CrossRefGoogle ScholarPubMed
16Ferrari, A.C.: Determination of bonding in diamond-like carbon by Raman spectroscopy. Diamond Relat. Mater. 11, 1053 2002Google Scholar
17Dillon, R.O., Woollan, J.A.Katanata, V.: Use of Raman scattering to investigate disorder and crystallite formation in as-deposited and annealed carbon films. Phys. Rev. B 29, 3482 1984CrossRefGoogle Scholar
18Hochella, M.F., Lindsay, J.R., Mossotti, V.G.Eggleston, C.M.: Sputter depth profiling in mineral-surface analysis. Amer. Miner. 73, 1449 1988Google Scholar
19Cancado, L.G., Takai, K., Enoki, T., Endo, M., Kim, Y.A., Mizusaki, H., Jorio, A., Coelho, L.N., Magalháes-Paniago, R.Pimenta, M.A.: General equation for the determination of the crystallite size La of nanographite by Raman spectroscopy. Appl. Phys. Lett. 88, 163106 2006CrossRefGoogle Scholar
20Barna, P.B.Adamik, M.: Fundamental structure forming phenomena of polycrystalline films and the structure zone models. Thin Solid Films 317, 27 1998Google Scholar
21Chowdhury, S., Laugier, M.T.Rahman, I.Z.: Characterization of DLC coatings deposited by rf magnetron sputtering. J. Mater. Proc. Technol. 153–154, 804 2004Google Scholar