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Mechanical properties and microstructures of metal/ceramic microlaminates: Part I. Nb/MoSi2 systems

Published online by Cambridge University Press:  31 January 2011

T.C. Chou ,
T.G. Nieh ,
T.Y. Tsui ,
G.M. Pharr  and
W.C. Oliver
T.C. Chou
Affiliation:
Lockheed Missiles and Space Company, Inc., Research and Development Division, O/93-10, B/204, Palo Alto, California 94304
T.G. Nieh
Affiliation:
Lockheed Missiles and Space Company, Inc., Research and Development Division, O/93-10, B/204, Palo Alto, California 94304
T.Y. Tsui
Affiliation:
Department of Materials Science, Rice University, P.O. Box 1892, Houston, Texas 77251
G.M. Pharr
Affiliation:
Department of Materials Science, Rice University, P.O. Box 1892, Houston, Texas 77251
W.C. Oliver
Affiliation:
Metals and Ceramics Division, Oak Ridge National Laboratory, Oak Ridge, Tennessee 37831-6116
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Abstract

Artificial multilayers, or microlaminates, composed of alternating layers of Nb and MoSi2 of equal thickness were synthesized by d.c., magnetron sputtering. Four different modulation wavelengths, λ, were studied: 7, 11, 20, and 100 nm. The compositions, periodicities, and microstructures of the microlaminates were characterized by Auger electron spectroscopy and transmission electron microscopy. Structural characterization revealed that the as-deposited Nb layers are polycrystalline, while the MoSi2 layers are amorphous. The hardnesses and elastic moduli of the films were measured using nanoindentation techniques. Neither a supermodulus nor a superhardness effect could be identified in the range of wavelengths investigated; for each of the microlaminates, both the hardness and modulus were found to fall between the bounds set by the properties of the monolithic Nb and MoSi2 films. Nevertheless, a modest but a measurable increase in both hardness and modulus with decreasing wavelength was observed, thus indicating that behavior cannot be entirely described by a simple rule-of-mixtures. The hardness was found to vary linearly with Δ−1/2 in a manner similar to the Hall–Petch relationship. Annealing the microlaminates at 800 °C for 90 min produces significant increases in hardness and modulus due to chemical interaction of the layers.

Type
Articles
Information
Journal of Materials Research , Volume 7 , Issue 10 , October 1992 , pp. 2765 - 2773
Copyright
Copyright © Materials Research Society 1992

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