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Li-Doped NiO Epitaxial Thin Film with Atomically Flat Surface

Published online by Cambridge University Press:  03 March 2011

T. Kamiya ,
H. Ohta ,
M. Kamiya ,
K. Nomura ,
K. Ueda ,
M. Hirano  and
H. Hosono
T. Kamiya*
Affiliation:
Materials and Structures Laboratory, Tokyo Institute of Technology, 4259 Nagatsuta, Midori, Yokohama 226-8503, Japan; and Hosono Transparent ElectroActive Materials Project, ERATO, JST, KSP C-1232, 3-2-1 Sakado, Takatsu, Kawasaki 213-0012, Japan
H. Ohta
Affiliation:
Hosono Transparent ElectroActive Materials Project, ERATO, JST, KSP C-1232, 3-2-1 Sakado, Takatsu, Kawasaki 213-0012, Japan
M. Kamiya
Affiliation:
Materials and Structures Laboratory, Tokyo Institute of Technology, 4259 Nagatsuta, Midori, Yokohama 226-8503, Japan
K. Nomura
Affiliation:
Materials and Structures Laboratory, Tokyo Institute of Technology, 4259 Nagatsuta, Midori, Yokohama 226-8503, Japan; and Hosono Transparent ElectroActive Materials Project, ERATO, JST, KSP C-1232, 3-2-1 Sakado, Takatsu, Kawasaki 213-0012, Japan
K. Ueda
Affiliation:
Materials and Structures Laboratory, Tokyo Institute of Technology, 4259 Nagatsuta, Midori, Yokohama 226-8503, Japan
M. Hirano
Affiliation:
Hosono Transparent ElectroActive Materials Project, ERATO, JST, KSP C-1232, 3-2-1 Sakado, Takatsu, Kawasaki 213-0012, Japan
H. Hosono
Affiliation:
Materials and Structures Laboratory, Tokyo Institute of Technology, 4259 Nagatsuta, Midori, Yokohama 226-8503, Japan; and Hosono Transparent ElectroActive Materials Project, ERATO, JST, KSP C-1232, 3-2-1 Sakado, Takatsu, Kawasaki 213-0012, Japan
*
a)Address all correspondence to this author. e-mail: tkamiya@msl.titech.ac.jp
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Abstract

Li-doped NiO epitaxial films with high electrical conductivity and atomically flat stepped surfaces were fabricated by a combined technique of pulsed laser deposition and subsequent annealing. It was determined that subsequently annealing at temperatures as low as 600 °C significantly decreased electrical conductivity due to Li evaporation when the film surface was not protected from Li evaporation. To suppress Li evaporation, a yttria-stabilized-zironia plate was used to cover the film surface, which raised the annealing temperature up to 1300 °C while maintaining a high Li concentration and electrical conductivity. Thermally annealing at this temperature also improved crystal quality and formed epitaxial films with atomically flat stepped surfaces. The films were single crystalline at least in observation areas, 10 μm × 10 μm. A reasonably large Hall mobility approximately 0.05 cm2/Vs similar to that reported for bulk single-crystal NiO and a visible-light transmission in excess of 75% were obtained on 120-nm-thick films. Although annealing at higher temperatures such as 1400 °C can further improve the structural and optical properties, the Li concentration in the films was decreased to <3% of the as-deposited film.

Keywords

Thin filmDeposition (PLD)Annealing
Type
Articles
Information
Journal of Materials Research , Volume 19 , Issue 3 , March 2004 , pp. 913 - 920
Copyright
Copyright © Materials Research Society 2004

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