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Layered TaSiN as an Oxidation Resistant Electrically Conductive Barrier

Published online by Cambridge University Press:  31 January 2011

A. Grill ,
C. Jahnes  and
C. Cabral Jr
A. Grill
Affiliation:
IBM Research Division, T.J. Watson Research Center, Yorktown Heights, New York 10598
C. Jahnes
Affiliation:
IBM Research Division, T.J. Watson Research Center, Yorktown Heights, New York 10598
C. Cabral Jr
Affiliation:
IBM Research Division, T.J. Watson Research Center, Yorktown Heights, New York 10598
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Abstract

TaSiN films deposited as layered TaN–SiN structures of various compositions have been examined for their oxidation resistant properties during annealing in oxygen at annealing conditions commonly used to prepare perovskite dielectrics. The films have been characterized by Rutherford backscattering analysis (RBS), x-ray diffraction (XRD), and electrical resistivity measurements. Films with less than 15 at.% Si showed some resistance to oxidation after annealing for 1 min at 650 °C but became fully oxidized after longer anneals. Increasing the Si content up to 28 at.% increasingly improved the oxidation resistance of the alloys to the point where the films resisted complete oxidation for up to 5 min at 700 °C. For alloys with greater than 28 at.% Si, no oxidation could be detected by RBS or electrical measurements for anneals up to 5 min at 700 °C. Furthermore, these high Si content alloys were still conductive with resistivities of near 1000 μΩ cm. It was also found that TaSiN and lead lanthanum titanate (PLT) interact strongly during annealing, and another nonoxidizing barrier metal, such as Pt, is required between the two materials if TaSiN is to be used as an electrode/barrier with lead-based perovskites.

Type
Articles
Information
Journal of Materials Research , Volume 14 , Issue 4 , April 1999 , pp. 1604 - 1609
Copyright
Copyright © Materials Research Society 1999

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References

REFERENCES

1.Khamankar, R. B., Kressley, M. A., Visokay, M. R., Moise, T., Nemoto, S., Okuno, Y., Fang, S. J., Wilson, A. M., Gaynor, J. F., Crenshaw, D.L., Summerfelt, S.R., and Colombo, L., IEDM 1997, 245 (1997).Google Scholar
2.Fujii, E., Otsuki, T., Judai, Y., Shimada, Y., Azuma, M., Uemoto, Y., Nagano, Y., Nasu, T., Izutsu, Y., Maysuda, A., Nakao, K., Tanaka, K., Hirano, K., Ito, T., Mikawa, T., Kutsumai, T., McMillan, L.d., and Paz de Araujo, C.A., IEDM 1997, 597 (1997).Google Scholar
3.Grill, A., Kane, W., Viggiano, J., Brady, M., and Laibowitz, R., J. Mater. Res. 7, 3260 (1992).CrossRefGoogle Scholar
4.Saenger, K. L., Grill, A., and Cabral, C. Jr, J. Mater. Res. 13, 462 (1998).CrossRefGoogle Scholar
5.Cabral, C. Jr, Colgan, E., and Grill, A., U.S. Patent 5,625,233, Apr. 29, 1997 (date filed: Jan. 13, 1995).Google Scholar
6.Grill, A. and Cabral, C. Jr, J. Mater. Res. 14, 1581 (1999).CrossRefGoogle Scholar
7.Summerfelt, S. R., U.S. Patent 5,504,041, Apr. 02, 1996.Google Scholar
8.Hara, T., Tanaka, M., Sakiyama, K., Onishi, S., Ishihara, K., and Kudo, J., Jpn. J. Appl. Phys. 36, L893 (1997).CrossRefGoogle Scholar
9.Agnello, P. D., Cabral, C. Jr, Grill, A., Jahnes, C., Licata, T. T., and Roy, A. R., U.S. Patent 5,576,579, Nov. 16, 1996 (date filed: Jan. 12, 1995).Google Scholar
10.Saenger, K. L., Grill, A., and Kotecki, D.E., J. Appl. Phys. 83, 802 (1998).CrossRefGoogle Scholar
11.Kolawa, E., Pokela, P. J., Reid, J. S., Chen, J.S., and Nicolet, M., Appl. Surf. Sci. 53, 373 (1991).CrossRefGoogle Scholar
12.Kolawa, E., Molarius, J. M., Nieh, C. W., and Nicolet, M., J. Vac. Sci. Technol. A8, 3006 (1990).CrossRefGoogle Scholar
13.Beach, D., Laibowitz, R., Shaw, T., Grill, A., and Kane, W., Int. Ferroelectrics 4, 535 (1994).Google Scholar