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Growth of diamond films and characterization by Raman, scanning electron microscopy, and x-ray photoelectron spectroscopy

Published online by Cambridge University Press:  31 January 2011

S. C. Sharma ,
M. Green ,
R. C. Hyer ,
C. A. Dark ,
T. D. Black ,
A. R. Chourasia ,
D. R. Chopra  and
K. K. Mishra
S. C. Sharma*
Affiliation:
Center for Positron Studies, Department of Physics, The University of Texas at Arlington, Arlington, Texas 76019
M. Green
Affiliation:
Center for Positron Studies, Department of Physics, The University of Texas at Arlington, Arlington, Texas 76019
R. C. Hyer
Affiliation:
Center for Positron Studies, Department of Physics, The University of Texas at Arlington, Arlington, Texas 76019
C. A. Dark
Affiliation:
Center for Positron Studies, Department of Physics, The University of Texas at Arlington, Arlington, Texas 76019
T. D. Black
Affiliation:
Center for Positron Studies, Department of Physics, The University of Texas at Arlington, Arlington, Texas 76019
A. R. Chourasia
Affiliation:
Department of Physics, East Texas State University, Commerce, Texas 75428
D. R. Chopra
Affiliation:
Department of Physics, East Texas State University, Commerce, Texas 75428
K. K. Mishra
Affiliation:
Department of Chemistry, The University of Texas at Arlington, Arlington, Texas 76019
*
a)Address correspondence to this author.
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Abstract

We have deposited diamond films on Si〈111〉 using hot filament assisted chemical vapor deposition at low pressures ∼25 Torr. Diamond films deposited at different relative concentrations of methane (ranging from 0.25% to 2.0%) in methane-hydrogen mixtures have been characterized by Raman spectroscopy, scanning electron microscopy, and x-ray photoelectron spectroscopy. With varying methane concentration, Raman spectra show features characteristic of crystalline diamond, diamond-like carbon, and polycrystalline graphite. Scanning electron micrographs show densely packed diamond crystallites. SEM measurements made on diamond films grown as a function of time show that the median grain size of the diamond crystallites increases linearly with time during the initial phase of the growth. X-ray photoelectron spectroscopy reveals differences between the diamond sp3 covalent bonding and sp2 graphitic bonding as well as the extent of s-p hybridization as a function of methane concentration. The plasmon loss shoulder, characteristic of graphite, is absent from the spectrum of 0.25% methane concentration film. But it appears in the XPS spectra of films grown at higher concentrations.

Type
Diamond and Diamond-Like Materials
Information
Journal of Materials Research , Volume 5 , Issue 11 , November 1990 , pp. 2424 - 2432
Copyright
Copyright © Materials Research Society 1990

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References

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