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Excimer laser-induced sputtering of YBa2Cu3O7−x

Published online by Cambridge University Press:  31 January 2011

U. Sudarsan ,
N. W. Cody ,
M. J. Bozack  and
R. Solanki
U. Sudarsan
Affiliation:
Departmentof Applied Physics and Electrical Engineering, Oregon Graduate Center, 19600 N. W. Von Neumann Drive, Beaverton, Oregon 97006-1999
N. W. Cody
Affiliation:
Departmentof Applied Physics and Electrical Engineering, Oregon Graduate Center, 19600 N. W. Von Neumann Drive, Beaverton, Oregon 97006-1999
M. J. Bozack
Affiliation:
Departmentof Applied Physics and Electrical Engineering, Oregon Graduate Center, 19600 N. W. Von Neumann Drive, Beaverton, Oregon 97006-1999
R. Solanki
Affiliation:
Departmentof Applied Physics and Electrical Engineering, Oregon Graduate Center, 19600 N. W. Von Neumann Drive, Beaverton, Oregon 97006-1999
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Abstract

Excimer laser-induced sputtering of YBa2Cu3O7−x targets has been investigated. Two aspects of this process are reported here: the spectral content of the emission and sputtering of the target. Postsputtering analysis of the sputtered area of the target shows a nonstoichiometric composition: rich in Cu but depleted of Ba and Y.

Type
Articles
Information
Journal of Materials Research , Volume 3 , Issue 5 , October 1988 , pp. 825 - 829
Copyright
Copyright © Materials Research Society 1988

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References

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