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Effective elastic constants and acoustic properties of single-crystal TiN/NbN superlattices

Published online by Cambridge University Press:  31 January 2011

Jin O. Kim ,
Jan D. Achenbach ,
Meenam Shinn  and
Scott A. Barnett
Jin O. Kim
Affiliation:
Center for Quality Engineering and Failure Prevention, Northwestern University, Evanston, Illinois 60208–3020
Jan D. Achenbach
Affiliation:
Center for Quality Engineering and Failure Prevention, Northwestern University, Evanston, Illinois 60208–3020
Meenam Shinn
Affiliation:
Department of Materials Science and Engineering, Northwestern University, Evanston, Illinois 60208–3108
Scott A. Barnett
Affiliation:
Department of Materials Science and Engineering, Northwestern University, Evanston, Illinois 60208–3108
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Abstract

Using the measured elastic constants of TiN and NbN single crystals with cubic symmetry, the effective elastic constants of single-crystal TiN/NbN superlattice films with tetragonal symmetry, namely c11, c12, c13, c33, c44, and c66 have been calculated for various thickness ratios of the layers. Using a line-focus acoustic microscope, measurements of surface acoustic waves (SAWs) have been carried out on single-crystal TiN/NbN superlattice films grown on the (001) plane of cubic crystal MgO substrates. The phase velocities measured as functions of the angle of propagation display the expected anisotropic nature of cubic crystals. Dispersion curves of SAWs propagating along the symmetry axes have been obtained by measuring wave velocities for various film thicknesses and frequencies. The SAW dispersion curves calculated from the effectiveelastic constants and the effective mass density of the superlattice films show very good agreement with experimental results. The results of this paper exhibit no anomalous dependence of the elastic constants on the superlattice period of TiN/NbN superlattices.

Type
Articles
Information
Journal of Materials Research , Volume 7 , Issue 8 , August 1992 , pp. 2248 - 2256
Copyright
Copyright © Materials Research Society 1992

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References

1.Shinn, M., Hultman, L., and Barnett, S. A., J. Mater. Res. 7, 901 (1992).CrossRefGoogle Scholar
2.Helmersson, U., Todorova, S., Barnett, S. A., Sundgren, J-E., Markert, L. C., and Greene, J. E., J. Appl. Phys. 62, 481 (1987).CrossRefGoogle Scholar
3.Mirkarimi, P. B., Hultman, L., and Barnett, S. A., Appl. Phys. Lett. 57, 2654 (1990).CrossRefGoogle Scholar
4.Yang, W. M. C., Tsakalakos, T., and Hilliard, J. E., J. Appl. Phys. 48, 876 (1977).CrossRefGoogle Scholar
5.Mirkarimi, P. B., Shinn, M., Barnett, S. A., Kumar, S., and Grimsditch, M., J. Appl. Phys. 71, 4955 (1992).CrossRefGoogle Scholar
6.Achenbach, J. D., A Theory of Elasticity with Microstructure for Directionally Reinforced Composites (Springer-Verlag, New York, 1975), pp. 21–38.CrossRefGoogle Scholar
7.Grimsditch, M., Phys. Rev. B 31, 6818 (1985).CrossRefGoogle Scholar
8.Grimsditch, M. and Nizzoli, F., Phys. Rev. B 33, 5891 (1986).CrossRefGoogle Scholar
9.Akcakaya, E. and Farnell, G. W., J. Appl. Phys. 64, 4469 (1988).CrossRefGoogle Scholar
10.Kim, J. O. and Achenbach, J. D., Thin Solid Films, to appear (1992).Google Scholar
11.Weglein, R. D., Appl. Phys. Lett. 34, 179 (1979).CrossRefGoogle Scholar
12.Weglein, R. D., IEEE Trans. Sonics Ultrason. SU-32, 225 (1985).CrossRefGoogle Scholar
13.Kushibiki, J. and Chubachi, N., IEEE Trans. Sonics Ultrason. SU-32, 189 (1985).CrossRefGoogle Scholar
14.Kim, J. O., Achenbach, J. D., Mirkarimi, P. B., Shinn, M., and Barnett, S. A., J. Appl. Phys., to appear (1992).Google Scholar
15.Mirkarimi, P. B., Shinn, M., and Barnett, S. A., J. Vac. Sci. Technol. A 10, 75 (1992).CrossRefGoogle Scholar
16.Hertzberg, R. W., Deformation and Fracture Mechanics of Engineering Materials (John Wiley & Sons, New York, 1989), 3rd ed., Chap. 1.Google Scholar
17.Holleck, H., J. Vac. Sci. Technol. A 4, 2661 (1986).CrossRefGoogle Scholar
18.Farnell, G. W. and Adler, E. L., in Physical Acoustics, edited by Mason, W. P. and Thurston, R. N. (Academic Press, New York, 1972), Vol. 9, Chap. 2.Google Scholar