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Diamond-like carbon films prepared by rf substrate biasing in an ECR discharge

Published online by Cambridge University Press:  31 January 2011

W. Varhue  and
P. Pastel
W. Varhue
Affiliation:
Department of Electrical Engineering, The University of Vermont, Burlington, Vermont 05405
P. Pastel
Affiliation:
Department of Electrical Engineering, The University of Vermont, Burlington, Vermont 05405
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Abstract

The optical band gap, density, and hydrogen content of diamond-like carbon films have been controllably varied by rf biasing the substrate in an ECR discharge of pure methane. The optical band gap varied from 2.7 to 1.2 eV, the density from 1.4 to 2.2 g/cm3, and the atomic fraction of hydrogen from 50 to 5%. The range of measured values is in agreement with those predicted by both the random covalent network and defected graphite models.

Type
Diamond and Diamond-Like Materials
Information
Journal of Materials Research , Volume 5 , Issue 11 , November 1990 , pp. 2441 - 2444
Copyright
Copyright © Materials Research Society 1990

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References

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