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Chemical Vapor Deposition of Sr1−xBaxNb2O6 Thin Films Using Metal Alkoxide Precursors

Published online by Cambridge University Press:  31 January 2011

Ruichao Zhang  and
Ren Xu
Ruichao Zhang
Affiliation:
Department of Materials Science and Engineering, University of Utah, Salt Lake City, Utah 84112
Ren Xu
Affiliation:
Department of Materials Science and Engineering, University of Utah, Salt Lake City, Utah 84112
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Abstract

A novel two-step metalorganic chemical vapor deposition process was used in this study to prepare Sr1−xBaxNb2O6 (SBN) thin films. Two thin layers of single-phase SrNb2O6 and BaNb2O6 were deposited alternately on a silicon substrate, and the solid solution of SBN was obtained by high-temperature annealing. The stoichiometry control of the SrNb2O6 and the BaNb2O6 thin films was achieved through deposition process control, according to the evaporation characteristics of double metal alkoxide. The evaporation behavior of double metal alkoxide precursors SrNb2(1-OC4H9)12 and BaNb2(1-OC4H9)12 was studied, and the results were compared with the evaporation of single alkoxide Nb(1-OC4H9)5.

Type
Articles
Information
Journal of Materials Research , Volume 15 , Issue 8 , August 2000 , pp. 1702 - 1708
Copyright
Copyright © Materials Research Society 2000

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