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Properties of lithium phosphorus oxynitride (Lipon) for 3D solid-state lithium batteries

Published online by Cambridge University Press:  31 January 2011

Yoongu Kim
Affiliation:
Material Science and Technology Division, Oak Ridge National Laboratory, Oak Ridge, Tennessee 37831-6124
Yet-Ming Chiang
Affiliation:
Department of Materials Science and Engineering, Massachusetts Institute of Technology, Cambridge, Massachusetts 02139
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Abstract

The thin film electrolyte known as Lipon (lithium phosphorous oxynitride) has proven successful for planar thin film battery applications. Here, the sputter deposition of the amorphous LiPON electrolyte onto more complex 3D structures is examined. The 3D structures include off-axis alignment of planar substrates and also 10–100 μm arrays of pores, columns, and grooves. For magnetron sputtering in N2 gas at 2.6 Pa, the Lipon film deposition is not restricted to be line-of-sight to the target, but forms conformal and dense films over the 3D and off-axis substrates. The deposition rate decreases for areas and grooves that are less accessible by the sputtered flux. The composition varies, but remains within the range that gives sufficient Li+ ionic conductivity, 2 ± 1 μS/cm.

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Copyright © Materials Research Society 2010

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References

1.Bates, J.B., Dudney, N.J., Gruzalski, G.R., Zuhr, R.A., Choudhury, A., Luck, C.F., Robertson, J.D.Electrical properties of amorphous lithium electrolyte thin films. Solid State Ionics 53–56, (Pt. 1)647 (1992)CrossRefGoogle Scholar
2.Bates, J.B., Dudney, N.J., Gruzalski, G.R., Zuhr, R.A., Choudhury, A., Luck, C.F., Robertson, J.D.Fabrication and characterization of amorphous lithium electrolyte thin films and rechargeable thin-film batteries. J. Power Sources 43, (1–3)103 (1993)CrossRefGoogle Scholar
3.Bates, J.B., Dudney, N.J., Lubben, D.C., Gruzalski, G.R., Kwak, B.S., Yu, X., Zuhr, R.A.Thin-film rechargeable lithium batteries. J. Power Sources 54, (1)58 (1995)CrossRefGoogle Scholar
4.Yu, X., Bates, J.B., Jellison, G.E. Jr., Hart, F.X.A stable thin-film lithium electrolyte: Lithium phosphorus oxynitride. J. Electrochem. Soc. 144, (2)524 (1997)CrossRefGoogle Scholar
5.Neudecker, B.J., Dudney, N.J., Bates, J.B.“Lithium-free” thin-film battery with in situ plated Li anode. J. Electrochem. Soc. 147, (2)517 (2000)CrossRefGoogle Scholar
6.Dudney, N.J.Solid-state thin-film rechargeable batteries. Mater. Sci. Eng., B 116, 245 (2005)CrossRefGoogle Scholar
7.Hamon, Y., Douard, A., Sabary, F., Marcel, C., Vinatier, P., Pecquenard, B., Levasseur, A.Influence of sputtering conditions on ionic conductivity of LiPON thin films. Solid State Ionics 177, (3–4)257 (2006)CrossRefGoogle Scholar
8.Roh, N.S., Lee, S.D., Kwon, H.S.Effects of deposition condition on the ionic conductivity and structure of amorphous lithium phosphorus oxynitrate thin film. Scr. Mater. 42, (1)43 (1999)CrossRefGoogle Scholar
9.Hu, Z., Li, D., Xie, K.Influence of radio frequency power on structure and ionic conductivity of LiPON thin films. Bull. Mater. Sci. 31, (4)681 (2008)CrossRefGoogle Scholar
10.Vereda, F., Clay, N., Gerouki, A., Goldner, R.B., Haas, T., Zerigian, P.A study of electronic shorting in IBDA-deposited Lipon films. J. Power Sources 89, (2)201 (2000)CrossRefGoogle Scholar
11.Kim, Y.G., Wadley, H.N.G.Lithium phosphorous oxynitride films synthesized by a plasma-assisted directed vapor deposition approach. J. Vac. Sci. Technol., A 26, (1)174 (2008)CrossRefGoogle Scholar
12.Zhao, S., Fu, Z., Qin, Q.A solid-state electrolyte lithium phosphorus oxynitride film prepared by pulsed laser deposition. Thin Solid Films 415, 108 (2002)CrossRefGoogle Scholar
13.Long, J.W., Dunn, B., Rolison, D.R., White, H.S.Three-dimensional battery architectures. Chem. Rev. 104, 4463 (2004)CrossRefGoogle Scholar
14.Notten, P.H.L., Roozeboom, F., Niessen, R.A.H., Baggetto, L.3-D integrated all-solid-state rechargeable batteries. Adv. Mater. 19, (24)4564 (2007)CrossRefGoogle Scholar
15.Ergang, N.S., Fierke, M.A., Wang, Z., Smyrl, W.H., Stein, A.Fabrication of a fully infiltrated three-dimensional solid-state interpenetrating electrochemical cell. J. Electrochem. Soc. 154, (12)A1135 (2007)CrossRefGoogle Scholar
16.Golodnitsky, D., Yufit, V., Nathan, M., Shechtman, I., Ripenbein, T., Strauss, E., Menkin, S., Peled, E.Advanced materials for the 3D microbattery. J. Power Sources 153, (2)281 (2006)CrossRefGoogle Scholar
17.Lai, W., Erdonmez, C.K., Marinis, T.F., Bjune, C.K., Dudney, N.J., Xu, F., Wartena, R., Chiang, Y-M.Ultrahigh energy density microbatteries enabled by new electrode architecture and micropackaging design. Adv. Mater. 22, E1 (2010)CrossRefGoogle Scholar
18.Dunn, B. Personal communicationGoogle Scholar
19.Westwood, W.D.Calculation of deposition rates in diode sputtering systems. J. Vac. Sci. Technol. 15, 1 (1978)CrossRefGoogle Scholar
20.Ohring, M.The Materials Science of Thin Films (Academic Press, San Diego, CA 2002)8796Google Scholar
21.Motohiro, T.Applications of Monte Carlo simulation in the analysis of a sputter-deposition process. J. Vac. Sci. Technol., A 4, 189 (1986)CrossRefGoogle Scholar
22.Nakano, T., Baba, S.Gas pressure effects on thickness uniformity and circumvented deposition during sputter deposition process. Vacuum 80, 647 (2006)CrossRefGoogle Scholar
23.Kim, Y., Dudney, N.J. Unpublished workGoogle Scholar
24.Yang, Y.G., Johnson, R.A., Wadley, H.N.G.A Monte Carlo simulation of the physical vapor deposition of nickel. Acta Mater. 45, 1455 (1997)CrossRefGoogle Scholar
25.Robertson, J.D., Bates, J.B., Dudney, N.J., Zuhr, R.A.Ion beam analysis of lithium-ion conducting amorphous electrolyte films. Nucl. Instrum. Methods, B 56, 722 (1991)CrossRefGoogle Scholar
26.Wang, B., Kwak, B.S., Sales, B.C., Bates, J.B.Ionic conductivities and structure of lithium phosphorus oxynitride glasses. J. Noncryst. Sol. 183, 297 (1995)CrossRefGoogle Scholar
27.Neudecker, B.J., Dudney, N.J., Bates, J.B.Lithium silicon tin oxynitride (LiySiTON): High-performance anode in thin-film lithium-ion batteries for microelectronics. J. Power Sources 81, 27 (1999)CrossRefGoogle Scholar
28.Dudney, N.J.Thin film micro-batteries. Electrochem. Soc. Interface 17, (3)44 (2008)Google Scholar
29.Lu, H-W., Yu, L., Zeng, W., Li, Y-S., Fu, Z-W.Fabrication and electrochemical properties of three-dimensional structure of LiCoO2 fibers. Electrochem. Solid-State Lett. 11, (8)A140 (2008)CrossRefGoogle Scholar

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