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Noncontact probing method for estimation of ferroelectric properties of PbTiO3-based films for microelectromechanical systems

Published online by Cambridge University Press:  17 April 2012

Yoshitaka Ehara
Affiliation:
Department of Innovative and Engineered Materials, Tokyo Institute of Technology, Kanagawa 226-8503, Japan
Satoru Utsugi
Affiliation:
Department of Innovative and Engineered Materials, Tokyo Institute of Technology, Kanagawa 226-8503, Japan
Mitsumasa Nakajima
Affiliation:
Department of Innovative and Engineered Materials, Tokyo Institute of Technology, Kanagawa 226-8503, Japan
Mohamed-Tahar Chentir
Affiliation:
Department of Innovative and Engineered Materials, Tokyo Institute of Technology, Kanagawa 226-8503, Japan
Tomoaki Yamada
Affiliation:
Department of Materials, Physics and Energy Engineering, Nagoya University, Nagoya 464-8603, Japan; and PRESTO, Japan Science and Technology Agency, Tokyo 102-0075, Japan
Takashi Iijima
Affiliation:
Research Center for Hydrogen Industrial Use and Storage, National Institute of Advanced Industrial Science and Technology, Ibaraki 305-8568, Japan
Ken Nishida
Affiliation:
Department of Communications Engineering, National Defense Academy, Kanagawa 239-8686, Japan
Takashi Yamamoto
Affiliation:
Department of Communications Engineering, National Defense Academy, Kanagawa 239-8686, Japan
Hiroshi Funakubo*
Affiliation:
Department of Innovative and Engineered Materials, Tokyo Institute of Technology, Kanagawa 226-8503, Japan
*
a)Address all correspondence to this author. e-mail: funakubo@iem.titech.ac.jp
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Abstract

Raman scattering spectra and ferroelectric properties of epitaxial tetragonal Pb(Zr, Ti)O3 were investigated for polar axis-oriented thin films with various Zr/(Zr + Ti) ratios and by changing the ratios from 0 to 0.50 at different measurement temperatures. The chosen films in the thickness range of 1–2 μm present the advantage of showing small residual strain. The E (TO) modes were successfully isolated using cross-polarization configurations, while A1 (TO) and B1 modes were activated using parallel polarization configurations. Systematic changes in Raman peak positions were observed with changes in the Zr/(Zr + Ti) ratios at different measurement temperatures. It was found in both cases that the tetragonal distortion (c/a-1) and the value of square of spontaneous polarization (Ps2) linearly increased with increasing ω2[A1(1TO)], where a and c are the lattice parameters of a and c-axes. This indicates that monitoring A1(1TO) mode is efficient as a characterization method of ferroelectricity. It can also be used as a novel nondestructive process check or reliability assessment technique during fabrication of microelectromechanical systems (MEMS) using piezoelectric materials.

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Articles
Copyright
Copyright © Materials Research Society 2012

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References

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