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8 - Science and Technology of Integrated Nitride Piezoelectric/Ultrananocrystalline Diamond (UNCD™) Films for a New Generation of Biomedical MEMS Energy Generation, Drug Delivery, and Sensor Devices

Published online by Cambridge University Press:  08 July 2022

By
Martin Zalazar  and
Orlando Auciello
Edited by
Orlando Auciello
Orlando Auciello
Affiliation:
University of Texas, Dallas
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Summary

This chapter focus on describing the science and technology related to the use of UNCD films for fabricating microelectromechanical systems (MEMS) and nanoelectromechanical systems (NEMS) structures suitable for use in various devices for medical applications. Topics discussed include: 1) Design and fabrication of UNCD-based micro-turbines for chemical lab on a chip, 2) description of the materials science involved in the integration of UNCD films with dissimilar materials in film form, such as piezoelectric nitrides for development of piezo-actuated UNCD-based MEMS/NEMS, and integration with metal films for contacts, and biological matter (e.g., heart cells) for cell bit-induced mechanical deformation of piezo/UNCD cantilevers to generate power via the converse piezoelectric effect, whereby mechanical deformationof cantilevers is transduced into power generation, via mechanical displacement in opposite directions of + and - ions in the piezoelectric layer, thus voltage generation between two electrode layers sandwiching the piezoelectric layer for a new generation of biomedicalenergy generation devices and biosensors.

Keywords

piezoelectricaluminum nitridefilmsUNCD filmsintegratedMEMS/NEMSbiosensordrug deliveryenergy generationsystems
Type
Chapter
Information
Ultrananocrystalline Diamond Coatings for Next-Generation High-Tech and Medical Devices , pp. 214 - 236
Publisher: Cambridge University Press
Print publication year: 2022

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