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Role of Fluorite Formation in Orientation Selection in Sol-Gel Derived Pb(Zr,Ti)O3 Films on Pt Electrode Layers

Published online by Cambridge University Press:  17 March 2011

G. J. Norga ,
L. Fè ,
F. Vasiliu ,
D. J. Wouters  and
O. Van der Biest
G. J. Norga
Affiliation:
IMEC vzw, Kapeldreef 75, B-3001 Leuven, Belgium
L. Fè
Affiliation:
IMEC vzw, Kapeldreef 75, B-3001 Leuven, Belgium
F. Vasiliu
Affiliation:
National Institute of Materials Physics, PO Box MG-7, R-76900, Bucharest-Magurele, Romania
D. J. Wouters
Affiliation:
IMEC vzw, Kapeldreef 75, B-3001 Leuven, Belgium
O. Van der Biest
Affiliation:
KU Leuven, MTM Department, Kasteelpark 44, B-3001 Leuven, Belgium
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Abstract

We present evidence that the microstructure of the metastable fluorite phase Pb2(Zr,Ti)2O6, which forms during the pyrolysis treatment of sol-gel PZT layers by homogeneous nucleation throughout the film, has a larger impact on orientation selection than has previously been realized. Elaborate TEM studies demonstrate that by varying the pyrolysis time, temperature and duration, the crystallinity of the transient fluorite phase can be greatly influenced. Pyrolysis at 350°C leads to the formation of a well crystallized fluorite phase with a cubic structure (Fd3m space group) and a= 10.5-10.6 Å. Rapid crystallization of the transient fluorite phase is attributed to the low oxygen partial pressure conditions, prevailing during burnoff of acetate groups originating from the lead starting compound. A possible connection between the fluorite formation kinetics and orientation selection in the layers is discussed.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 688: Symposium C – Ferroelectric Thin Films X , 2001 , C1.2.1
Copyright
Copyright © Materials Research Society 2002

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