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Stress nature investigation on heteroepitaxial 3C–SiC film on (100) Si substrates
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- Journal:
- Journal of Materials Research / Volume 28 / Issue 1 / 14 January 2013
- Published online by Cambridge University Press:
- 24 July 2012, pp. 129-135
- Print publication:
- 14 January 2013
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- Article
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