5 results
Comparison of diamond-like carbon film deposition by electron cyclotron resonance with benzene and methane
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- Journal:
- Journal of Materials Research / Volume 11 / Issue 1 / January 1996
- Published online by Cambridge University Press:
- 31 January 2011, pp. 221-228
- Print publication:
- January 1996
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Low-Temperature Growth of Si:Er by Electron Cyclotron Resonance Pecvd Using Metal Organics
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- Journal:
- MRS Online Proceedings Library Archive / Volume 422 / 1996
- Published online by Cambridge University Press:
- 10 February 2011, 57
- Print publication:
- 1996
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The Effect of Reactor Pressure on the Growth of Glow Discharge a-SiN:H
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- Journal:
- MRS Online Proceedings Library Archive / Volume 165 / 1989
- Published online by Cambridge University Press:
- 21 February 2011, 29
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- 1989
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Optical Band Gap of Diamond-Like Carbon Films as a Function of RF Substrate Bias
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- Journal:
- MRS Online Proceedings Library Archive / Volume 162 / 1989
- Published online by Cambridge University Press:
- 26 February 2011, 389
- Print publication:
- 1989
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Amorphous to Crystalline Structural Transition during Growth of Silicon by Plasma Enhanced Chemical vapor Deposition
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- Journal:
- MRS Online Proceedings Library Archive / Volume 131 / 1988
- Published online by Cambridge University Press:
- 25 February 2011, 269
- Print publication:
- 1988
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