Skip to main content Accessibility help
×
Home

The Effect of Reactor Pressure on the Growth of Glow Discharge a-SiN:H

  • W. J. Varhue (a1) and K. A. Pandelisev (a2)

Abstract

The electrical resistivity and N content of a-SiN:H films can be controlled by varying the reactor pressure. This appears to be a result of the increased dissociation of the ammonia feed gas by the change in the electron energy spectrum. The effect of ion bombardment of the substrate surface does not result in observable changes in film quality.

Copyright

References

Hide All
1. Weimer, P. K., Physics of Thin Films, Vol.2., Academic Press, New York, 147 (1964).
2. Brody, T. P., IEEE Trans. Electron Devices, Vol. ED–31, 11, 1614 (1984).
3. Snell, A. J., Mackenzie, K. D., Spear, W. E., LeComber, P. G. and Hughes, A. J., Appl. Phys., 24, 357 (1981).
4. Robertson, J., Phil. Mag. B, 44, 2, 215 (1981).
5. Manzini, S., J. Appl. Phys., 62, 8, 3278 (1987).
6. Kapoor, V. J. and Turi, R. A., J. Appl. Phys., 52, 1, 311 (1981).
7. Ngai, K. L. and Hsia, Y., Appl. Phys. Lett. 41, 2, 159 (1982).
8. Powell, M. J., Appl. Phys. Lett. 43, 6, 597 (1983).
9. Robertson, J. and Powell, M. J., Appl. Phys. Lett. 44 (4) 415 (1984).
10. Krick, D. T., Lenahan, P. M. and Kanicki, J., Phys. Rev. 38 (12) 8226 (1988).
11. Nguyen, S. V., J. of Electronic Mat. 16 (4) 275 (1987).
12. Jones, B. L., J. of Non-Cryst. Solids 77, 957 (1985).
13. Morimoto, A., Tsujimura, Y., Kumeda, M. and Shimizu, T., Jpn. J. of Appl. Phys. 24 (11) 1394 (1985).
14. Makino, T. and Maeda, M., Jpn. J. of Appl. Phys. 25 (9) 1300 (1986).
15. Hasegawa, S., Matuura, M. and Kurata, Y., Appl. Phys. Lett. 49 (19) 1272 (1986).
16. Lanford, W. A. and Rand, M. J., J. Appl. Phys., 49 (4) 2473 (1978).
17. Smith, J. R., Hershkowitz, N. and Coakley, P., Rev. Sci. Instrum. 50 (2) 210 (1979).
18. Garscadden, A., Duke, G. L., and Bailey, W. F., Appl. Phys. Lett. 43 (11) 1012 (1983).

The Effect of Reactor Pressure on the Growth of Glow Discharge a-SiN:H

  • W. J. Varhue (a1) and K. A. Pandelisev (a2)

Metrics

Full text views

Total number of HTML views: 0
Total number of PDF views: 0 *
Loading metrics...

Abstract views

Total abstract views: 0 *
Loading metrics...

* Views captured on Cambridge Core between <date>. This data will be updated every 24 hours.

Usage data cannot currently be displayed