A hybrid process, based upon gas-to-particle conversion and chemical vapor deposition, is presented as an alternative technique for producing porous films with the main advantage of solvent-free, low-substrate temperature operation. Starting from precursors of platinum acetylacetonate and aluminum acetylacetonate, nanoparticles were produced by chemical reaction followed by gas-to-particle conversion. Downstream of this reaction zone, these nanoparticles were collected via thermophoresis onto a cooled substrate forming a porous, nanocermet film that may have possible uses in catalytic, sensor, or coating applications.
In this study, Pt/Alumina nanocermet films were produced by two routes: either simultaneous precursor injection processing or a layer-by-layer approach. Energy-dispersive X-ray spectroscopy revealed that this hybrid process results in reasonable control of the amount of Pt within each sample. From transmission electron spectroscopy images taken of films produced by simultaneous processing, Pt nanoparticles appear to be co-agglomerated with alumina. The results may identify changes that can be made to the process to improve properties, such as catalytic activity, in the nanocermet films.