2 results
Enhanced Antimony Activation for Ultra-Shallow Junctions in Strained Silicon
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- Journal:
- MRS Online Proceedings Library Archive / Volume 912 / 2006
- Published online by Cambridge University Press:
- 01 February 2011, 0912-C02-03
- Print publication:
- 2006
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- Article
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Furnace and Rta Injection of Point Defects into CVD-Grown B Doped Si and SiGe
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- Journal:
- MRS Online Proceedings Library Archive / Volume 610 / 2000
- Published online by Cambridge University Press:
- 17 March 2011, B4.9
- Print publication:
- 2000
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- Article
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