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Thin silicon dioxide and nitrided oxide using rapid thermal processing for trench capacitors
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- Journal:
- Journal of Materials Research / Volume 6 / Issue 11 / November 1991
- Published online by Cambridge University Press:
- 31 January 2011, pp. 2362-2370
- Print publication:
- November 1991
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Post-Annealing Effect on the Reliability of Ultra-Thin Silicon Dioxide with Polysilicon Gate
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- Journal:
- MRS Online Proceedings Library Archive / Volume 182 / 1990
- Published online by Cambridge University Press:
- 21 February 2011, 321
- Print publication:
- 1990
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Thin Silicon Dioxide using the Rapid Thermal Oxidation Process for Trench Capacitors
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- Journal:
- MRS Online Proceedings Library Archive / Volume 146 / 1989
- Published online by Cambridge University Press:
- 25 February 2011, 283
- Print publication:
- 1989
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