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A novel copper damascene technique for power loaded SAW structures
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- Journal:
- MRS Online Proceedings Library Archive / Volume 833 / 2004
- Published online by Cambridge University Press:
- 01 February 2011, G3.13
- Print publication:
- 2004
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Growth of Ain on Si(111) by Plasma-Assisted Molecular Beam Epitaxy: Application to Surface Acoustic Wave Devices
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- Journal:
- MRS Online Proceedings Library Archive / Volume 535 / 1998
- Published online by Cambridge University Press:
- 10 February 2011, 113
- Print publication:
- 1998
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