The modified expression for Debye-Waller factor is derived for the scattering of X-rays from rough surfaces and interfaces.
For the large values of scattering vector, the non-Gaussian behaviour of this factor is predicted.
This effect can be essential for interpretation of X-ray reflectivity from very rough surfaces and high-order X-ray diffraction data.
The experimental X-ray reflectivity measurements are interpreted using the derived expression.