3 results
Ultra-low Contact Resistivity by High Concentration Germanium and Boron Ion Implantation Combined with Low Temperature Annealing
-
- Journal:
- MRS Online Proceedings Library Archive / Volume 427 / 1996
- Published online by Cambridge University Press:
- 15 February 2011, 153
- Print publication:
- 1996
-
- Article
- Export citation
Effect of Annealing on Undoped a-Si:H Films Prepared by Mercury-Sensitized Photochemical Vapor Deposition
-
- Journal:
- MRS Online Proceedings Library Archive / Volume 258 / 1992
- Published online by Cambridge University Press:
- 21 February 2011, 159
- Print publication:
- 1992
-
- Article
- Export citation
Reduction of Si-H2 Bond Content in Hydrogenated Amorphous Silicon Prepared by Mercury-Sensitized Photochemical Vapor Deposition
-
- Journal:
- MRS Online Proceedings Library Archive / Volume 192 / 1990
- Published online by Cambridge University Press:
- 25 February 2011, 517
- Print publication:
- 1990
-
- Article
- Export citation