A series of sol-gel derived PZT films with various Zr/Ti ratios - namely PT, 0/100 - 20/80, 35/65, 53/47, 65/35, 80/20, 94/6 and PZ, 100/0 - were prepared on platinized Si wafers. Excess PbO was added to the precursor chemistries to compensate for eventual PbO loss and also to aid in obtaining the desired perovskite phase.
It was found that the phase assembly, namely the presence of tetragonal or rhombohedral perovskite phases, plays an important role in determining the fatigue and retention behavior. PT-rich (or tetragonal) films offer better retention characteristics than those observed in PZ-rich (or rhombohedral) or PZT 53/47 films. Films with PZrich compositions tend to exhibit superior fatigue behavior compared with PT-rich films.