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Gas Phase Conditions for Obtaining Device Quality Amorphous Silicon at Low Temperature and High Deposition Rate
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- Journal:
- MRS Online Proceedings Library Archive / Volume 1153 / 2009
- Published online by Cambridge University Press:
- 31 January 2011, 1153-A22-04
- Print publication:
- 2009
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- Article
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Relation between Electronic Properties and Density of Crystalline Agglomerates in Microcrystalline Silicon
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- Journal:
- MRS Online Proceedings Library Archive / Volume 989 / 2007
- Published online by Cambridge University Press:
- 01 February 2011, 0989-A07-01
- Print publication:
- 2007
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- Article
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