8 results
Study of Cobalt Salicide Fabrication on Sub-Quarter Micron Polysilicon Lines
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- Journal:
- MRS Online Proceedings Library Archive / Volume 429 / 1996
- Published online by Cambridge University Press:
- 10 February 2011, 163
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- 1996
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High Temperature Thermal Processing for Ulsi Applications
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- Journal:
- MRS Online Proceedings Library Archive / Volume 387 / 1995
- Published online by Cambridge University Press:
- 15 February 2011, 201
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- 1995
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Combined Simulation and Measurement Study of Temperature Uniformity in Rapid Thermal Processing
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- Journal:
- MRS Online Proceedings Library Archive / Volume 303 / 1993
- Published online by Cambridge University Press:
- 21 February 2011, 231
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- 1993
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Quantification and Characterization of the Thermal Degradation of TiSi2 Using Thermal Wave Analysis
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- Journal:
- MRS Online Proceedings Library Archive / Volume 260 / 1992
- Published online by Cambridge University Press:
- 25 February 2011, 213
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- 1992
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Interactions and Stability of Cu on CoSi2
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- Journal:
- MRS Online Proceedings Library Archive / Volume 260 / 1992
- Published online by Cambridge University Press:
- 25 February 2011, 151
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- 1992
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Grain growth in boron doped LPCVD polysilicon films
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- Journal:
- Journal of Materials Research / Volume 5 / Issue 2 / February 1990
- Published online by Cambridge University Press:
- 31 January 2011, pp. 360-364
- Print publication:
- February 1990
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Cobalt Silicide Formation on Polysilicon: Dopant Effects on Reaction Kinetics and Silicide Properties
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- Journal:
- MRS Online Proceedings Library Archive / Volume 181 / 1990
- Published online by Cambridge University Press:
- 25 February 2011, 185
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- 1990
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In Situ Study of Stresses Generated During the Formation of Cobalt Disilicide and the Effect of Post Silicide Processing
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- Journal:
- MRS Online Proceedings Library Archive / Volume 188 / 1990
- Published online by Cambridge University Press:
- 16 February 2011, 67
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- 1990
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