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First Pass Study of Surface Modified Porous Low-k by Ion Implantation for Zero Thickness Barrier Requirement of Cu/MSQ/Si Stacks in Copper Metallization Scheme
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- Journal:
- MRS Online Proceedings Library Archive / Volume 863 / 2005
- Published online by Cambridge University Press:
- 01 February 2011, B2.6
- Print publication:
- 2005
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- Article
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Mechanical Enhancement Of Nanoporous Low-K Films As Interlayer Dielectrics By Ion Implantation
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- Journal:
- MRS Online Proceedings Library Archive / Volume 734 / 2002
- Published online by Cambridge University Press:
- 11 February 2011, B5.3
- Print publication:
- 2002
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- Article
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