8 results
Secondary Defect Formation And Gettering in Mev Self-Implanted Silicon
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- Journal:
- MRS Online Proceedings Library Archive / Volume 439 / 1996
- Published online by Cambridge University Press:
- 15 February 2011, 155
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- 1996
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Cu Deposition Characteristics into Submicron Contact Holes Employing Self-Sputtering With a High Ionization Rate
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- Journal:
- MRS Online Proceedings Library Archive / Volume 427 / 1996
- Published online by Cambridge University Press:
- 15 February 2011, 185
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- 1996
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Secondary Defect Formation and Gettering in MeV Self-Implanted Silicon
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- Journal:
- MRS Online Proceedings Library Archive / Volume 438 / 1996
- Published online by Cambridge University Press:
- 03 September 2012, 155
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- 1996
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The Performance Study of Ion Implanter Based Medium Energy Ion Spectroscopy with Solid State Detector
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- Journal:
- MRS Online Proceedings Library Archive / Volume 324 / 1993
- Published online by Cambridge University Press:
- 22 February 2011, 409
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- 1993
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Metallic Impurities in n- and p- Type Silicon: Dlts Studies
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- Journal:
- MRS Online Proceedings Library Archive / Volume 262 / 1992
- Published online by Cambridge University Press:
- 03 September 2012, 615
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- 1992
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Ebic Analysis of Gettering at Si-Si (Ge) Heteroepitaxial Misfit Dislocations as a Function of Impurity Decoration
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- Journal:
- MRS Online Proceedings Library Archive / Volume 262 / 1992
- Published online by Cambridge University Press:
- 03 September 2012, 609
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- 1992
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X-ray topography and EBIC studies of misfit dislocations in strained layer structures
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- Journal:
- MRS Online Proceedings Library Archive / Volume 102 / 1987
- Published online by Cambridge University Press:
- 26 February 2011, 541
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- 1987
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Electrical Characterization of Silicon With Buried Defects
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- Journal:
- MRS Online Proceedings Library Archive / Volume 104 / 1987
- Published online by Cambridge University Press:
- 26 February 2011, 121
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- 1987
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