2 results
Perfect selective Si epitaxial growth realized by synchrotron radiation irradiation during disilane molecular beam epitaxy
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- Journal:
- MRS Online Proceedings Library Archive / Volume 334 / 1993
- Published online by Cambridge University Press:
- 22 February 2011, 525
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- 1993
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Photochemical Area-Selective Etching of Si And Sio2 Using Synchrotron Radiation
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- Journal:
- MRS Online Proceedings Library Archive / Volume 158 / 1989
- Published online by Cambridge University Press:
- 21 February 2011, 53
- Print publication:
- 1989
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