2 results
Novel Doping Process for Ultra-Shallow Junction: Rapid Vapor-Phase Direct Doping (RVD)
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- Journal:
- MRS Online Proceedings Library Archive / Volume 259 / 1992
- Published online by Cambridge University Press:
- 25 February 2011, 493
- Print publication:
- 1992
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- Article
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Growth of A β-SiC Filli on a Si Substrate by a Direct Carbonization Method
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- Journal:
- MRS Online Proceedings Library Archive / Volume 220 / 1991
- Published online by Cambridge University Press:
- 22 February 2011, 569
- Print publication:
- 1991
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- Article
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