2 results
Rapid Thermal Nitridation of Thin Oxides
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- Journal:
- MRS Online Proceedings Library Archive / Volume 92 / 1987
- Published online by Cambridge University Press:
- 28 February 2011, 121
- Print publication:
- 1987
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- Article
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A Novel Silicided Shallow Junction Technology for Cmos VLSI
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- Journal:
- MRS Online Proceedings Library Archive / Volume 71 / 1986
- Published online by Cambridge University Press:
- 28 February 2011, 379
- Print publication:
- 1986
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- Article
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