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Studies of Nanomechanical Properties of Pulsed Laser Deposited NbN films on Si Using Nanoindentation
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- Journal:
- MRS Online Proceedings Library Archive / Volume 1424 / 2012
- Published online by Cambridge University Press:
- 24 January 2012, mrsf11-1424-ss07-64
- Print publication:
- 2012
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- Article
- Export citation