5 results
Low Energy, High Density Plasma (ICP) for Low Defect Etching and Deposition Applications on Compound Semiconductors
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- Journal:
- MRS Online Proceedings Library Archive / Volume 573 / 1999
- Published online by Cambridge University Press:
- 10 February 2011, 189
- Print publication:
- 1999
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Deposition of Silicon Dioxide Layers on Inp by Flash C.V.D for Misfet Applications
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- Journal:
- MRS Online Proceedings Library Archive / Volume 126 / 1988
- Published online by Cambridge University Press:
- 21 February 2011, 277
- Print publication:
- 1988
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Direct Writing of Al on Si by UV Exposure Prior to Laser-Assisted CVD
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- Journal:
- MRS Online Proceedings Library Archive / Volume 75 / 1986
- Published online by Cambridge University Press:
- 28 February 2011, 129
- Print publication:
- 1986
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The Effect of Impurities in the SPE Kinetics in GaAs
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- Journal:
- MRS Online Proceedings Library Archive / Volume 52 / 1985
- Published online by Cambridge University Press:
- 26 February 2011, 369
- Print publication:
- 1985
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Diffusion of Si in GaAs From a Thin Si Film by Pulsed Laser Irradiation
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- Journal:
- MRS Online Proceedings Library Archive / Volume 4 / 1981
- Published online by Cambridge University Press:
- 15 February 2011, 677
- Print publication:
- 1981
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