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Investigation of the crystal structure on the nanomechanical properties of pulsed laser deposited niobium nitride thin films
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- Journal:
- Journal of Materials Research / Volume 27 / Issue 13 / 14 July 2012
- Published online by Cambridge University Press:
- 30 May 2012, pp. 1725-1731
- Print publication:
- 14 July 2012
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- Article
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