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Residual stress measurements of thin aluminum metallizations by continuous indentation and x-ray stress measurement techniques
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- Journal:
- Journal of Materials Research / Volume 6 / Issue 10 / October 1991
- Published online by Cambridge University Press:
- 31 January 2011, pp. 2084-2090
- Print publication:
- October 1991
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Hardness and Adhesion Measurements of Copper Metallizations by a Continuous Indentation Approach
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- Journal:
- MRS Online Proceedings Library Archive / Volume 203 / 1990
- Published online by Cambridge University Press:
- 25 February 2011, 163
- Print publication:
- 1990
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