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Texture of Polycrystalline MoSx Thin Films Magnetron Sputtered from a Metallic Target in Ar-H2S Atmospheres
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- Journal:
- MRS Online Proceedings Library Archive / Volume 721 / 2002
- Published online by Cambridge University Press:
- 01 February 2011, J5.3
- Print publication:
- 2002
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- Article
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