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3 - Non-inertial forces
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Plate section
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5 - First-level packaging
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7 - Accelerometers
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1 - Introduction
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9 - Test and calibration
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4 - MEMS technologies
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8 - Gyroscopes
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Index
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6 - Electrical interfaces
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Preface
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Concluding remarks
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2 - Transducers
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Frontmatter
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Notation
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Contents
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![](https://assets.cambridge.org/97805217/66586/cover/9780521766586.jpg)
Inertial MEMS
- Principles and Practice
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Acknowledgments
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