1 results
Studies of the Coefficient of Thermal Expansion of Low-k ILD Materials by X-Ray Reflectivity
-
- Journal:
- MRS Online Proceedings Library Archive / Volume 914 / 2006
- Published online by Cambridge University Press:
- 01 February 2011, 0914-F11-02
- Print publication:
- 2006
-
- Article
- Export citation