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Investigation of Damage Induced by Low Energy Focused Ion Beam Irradiation in GaAs
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- Journal:
- MRS Online Proceedings Library Archive / Volume 316 / 1993
- Published online by Cambridge University Press:
- 22 February 2011, 1047
- Print publication:
- 1993
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- Article
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Maskless Formation of Tungsten Films by Ion Beam Assisted Deposition Technique
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- Journal:
- MRS Online Proceedings Library Archive / Volume 158 / 1989
- Published online by Cambridge University Press:
- 21 February 2011, 223
- Print publication:
- 1989
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- Article
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