2 results
Low Temperature Fabrication of Microcrystalline Silicon Germanium Films by RF Reactive Magnetron Sputtering
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- Journal:
- MRS Online Proceedings Library Archive / Volume 910 / 2006
- Published online by Cambridge University Press:
- 01 February 2011, 0910-A13-05
- Print publication:
- 2006
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- Article
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Micro-crystalline silicon-germanium thin films prepared by the multi-target RF sputtering system
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- Journal:
- MRS Online Proceedings Library Archive / Volume 862 / 2005
- Published online by Cambridge University Press:
- 01 February 2011, A6.2
- Print publication:
- 2005
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- Article
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